@inproceedings{inproceedingsc93ff9a9,
title   = {Formation of 3C-SIC films on silicon by thermal annealing process},
author = {Oliveira, Alessandro Ricardo de and Paez Carreño, Marcelo Nelson},
year = {2004},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}