@inproceedings{inproceedingse1456920,
title   = {One mask step a-Si:H/a-SiOxNy thin film transistor},
author = {Albertin, Katia Franklin and Pereyra, Inés},
year = {2004},
publisher = {The Electrochemical Society},
booktitle   = {Symposium on Microelectronics Technology and Devices SBMICRO}
}