@inproceedings{inproceedings891cde5b,
title   = {Comparison of the structural properties of the PECVD SIOXNY dielectric layer with the interface electrical properties in SI/SIOXNY/AL capacitors},
author = {Albertin, Katia Franklin and Fantini, Márcia Carvalho de Abreu and Pereyra, Inés},
year = {2004},
publisher = {SBPMat},
booktitle   = {Encontro da SBPMat}
}