@inproceedings{inproceedings1e296057,
title   = {Xanes characterization in PECVD-SiOxNy films},
author = {Criado, Denise and Alayo Chávez, Marco Isaías and Pereyra, Inés and Fantini, Márcia Carvalho de Abreu},
year = {2004},
publisher = {SBPMat},
booktitle   = {Encontro da SBPMat}
}