@misc{miscf797b162, title = {Design of continuous full complex modulation proximity printing masks using a quadratic phase distribution}, author = {Gonçalves Neto, Luiz and Cirino, Giuseppe Antonio and Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Seabra, Antonio Carlos}, year = {2004}, booktitle = {Micromachining Technology for Micro-Optics and Nano-Optics II} }