@inbook{inbook26a240c7, title = {Analysis of HALO implant influence on the self-heating and self-heating enhanced impact ionization on 0.13μm floating-body partially-depleted SOI MOSFET at low temperature}, author = {Pavanello, Marcelo Antonio and Martino, João Antonio and Simoen, Eddy and Mercha, A. and Claeys, Cor and Van Meer, H. and De Meyer, K.}, year = {2003}, publisher = {The Electrochemical Society}, booktitle = {International Symposium on SOI Technology and Devices} }