@misc{misc92fa44c9,
title   = {Porous silicon processing for enhancing thin silicon membranes fabrication},
author = {Dantas, Michel Oliveira da Silva and Galeazzo, Elisabete and Peres, Henrique Estanislau Maldonado and Ramírez Fernandez, Francisco Javier},
year = {2003},
publisher = {EPUSP}
}