@misc{misccada1567,
title   = {Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates},
author = {Gonçalves Neto, Luiz and Cirino, Giuseppe Antonio and Mansano, Ronaldo Domingues and Cardona, Patricia Soares Pinto and Verdonck, Patrick Bernard},
year = {2003},
booktitle   = {Micromachining Technology for Micro-Optics and Nano-Optics}
}