@inbook{inbook4f21cdce,
title   = {Porous silicon processing for enhancing thin silicon membranes fabrication},
author = {Dantas, Michel Oliveira da Silva and Galeazzo, Elisabete and Peres, Henrique Estanislau Maldonado and Ramírez Fernandez, Francisco Javier},
year = {2003},
publisher = {Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO 2003, São Paulo /}
}