@inbook{inbookbf65d099, title = {Photoconductivity of semi-insulating polysilicon}, author = {Lantin, Daniela Garrote and Onoda, Edyr and Zambom, Luís da Silva and Mansano, Ronaldo Domingues}, year = {2003}, publisher = {Electrochemical Society}, booktitle = {International Symposium on Microelectronics Technology and Devices SBMICRO} }