@inbook{inbook867a3225,
title   = {Self-sustained bridges of a-SiC:H obtained by PECVD technique},
author = {Paez Carreño, Marcelo Nelson and Lopes, Alexandre Tavares},
year = {2003},
publisher = {Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}