@inbook{inbook9f6d441f,
title   = {In-situ and ion implantation nitrogen doping on near stoichiometric a-SiC:H films},
author = {Oliveira, Alessandro Ricardo de and Paez Carreño, Marcelo Nelson},
year = {2003},
publisher = {Electrochemical Society},
journal   = {Microelectronic Technology and Devices SBMicro 2003}
}