@inbook{inbook5561d257,
title   = {Determination of the silicon film thickness and back oxide charge density on graded-channel SOI nMOSFETs},
author = {Nicolett, Aparecido Sirley and Martino, João Antonio and Pavanello, Marcelo Antonio},
year = {2003},
publisher = {Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}