@article{article76676ab6,
title   = {Silicon nitride deposited by inductively coupled plasma using dichlorosilane and ammonia},
author = {Zambom, Luís da Silva and Mansano, Ronaldo Domingues},
year = {2003},
doi = {10.1016/s0042-207x(03)00002-2},
journal   = {Vacuum}
}