@inproceedings{inproceedings90604241,
title   = {Study of power balance in electronegative capacitively coupled plasmas},
author = {Swart, Laura and Verdonck, Patrick Bernard and Moshkalyov, Stanislav A},
year = {2003},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices - SBMICRO}
}