@article{article9cd9b70f,
title   = {Theoretical and experimental studies of the atomic structure of oxygen-rich amorphous silicon oxynitride films},
author = {Scopel, Wanderla Luis and Silva, Antonio Jose Roque da and Orellana, Walter M and Prado, Rogerio Junqueira and Fantini, Márcia Carvalho de Abreu and Fazzio, Adalberto and Pereyra, Inés},
year = {2003},
doi = {10.1103/physrevb.68.155332},
journal   = {Physical Review B}
}