@inproceedings{inproceedingsd51ba860,
title   = {H and N behavior during green and blue pulsed-laser crystallization of a-Si:H, a-Si:N, a-Ge:H, and a-Ge:N alloys},
author = {Mulato, M. and Zanatta, Antonio Ricardo and Toet, D. and Chambouleyron, I. E.},
year = {2003},
booktitle   = {International Conference on Amorphous and Microcrystalline Semiconductors : Science and Technology - ICAMS}
}