@article{articlea70f16a9,
title   = {Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films},
author = {Nardes, Alexandre Mantovani and Andrade, Adnei Melges de and Fonseca, Fernando Josepetti and Dirani, Ely Antonio Tadeu and Muccillo, Reginaldo and Muccillo, Eliana Navarro dos Santos},
year = {2003},
journal   = {Journal of Materials Science: materials in electronics}
}