@inproceedings{inproceedingsaa73efc5,
title   = {Silicon micromechanical structures fabricated by electrochemical process},
author = {Dantas, M. O. S. and Galeazzo, Elisabete and Pees, H. E. M. and Ramírez Fernandez, Francisco Javier},
year = {2002},
publisher = {IEEE},
booktitle   = {Conference on Sensors}
}