@inproceedings{inproceedingse6fd24e7,
title   = {Optical waveguides of PECVD silicon oxynitride films},
author = {Alayo Chávez, Marco Isaías and Pereyra, Inés and Scopel, Wanderla Luis and Fantini, Márcia Carvalho de Abreu},
year = {2002},
publisher = {SBPMat},
booktitle   = {Encontro da Sociedade Brasileira de Pesquisa em Materiais}
}