@article{article5f0dac20,
title   = {Highly conductive N-Type µc-Si:H films deposited at very low temperature},
author = {Nardes, Alexandre Mantovani and Dirani, Ely Antonio Tadeu},
year = {2002},
journal   = {Boletim Técnico da Escola Politécnica da USP. Departamento de Engenharia de Sistemas Eletrônicos}
}