@inproceedings{inproceedingsf3ae21c7, title = {Full complex amplitude modulation proximity printing mask fabricated on DLC and SiO2 subtrates}, author = {Gonçalves Neto, Luiz and Cirino, Giuseppe Antonio and Mansano, Ronaldo Domingues and Cardona, Patrícia Soares Pinto and Verdonck, Patrick Bernard}, year = {2002}, publisher = {Optical Society of America}, booktitle = {Diffractive Optics and Micro-Optics} }