@inbook{inbooka20627d3,
title   = {Highly conductive n-type MC-Si:H films deposited at very low temperature},
author = {Nardes, Alexandre Mantovani and Dirani, Ely Antonio Tadeu and Andrade, Adnei Melges de and Fonseca, Fernando Josepetti},
year = {2002},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO 2002}
}