@inbook{inbook2216bdb6,
title   = {3D topography in self-sustained membranes of SiOxNy obtained by PECVD technique at low temperatures},
author = {Páez Carreño, Marcelo Nelson and Lopes, Alexandre Tavares and Alayo Chávez, Marco Isaías and Pereyra, Inés},
year = {2002},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices}
}