@inbook{inbook25390bf9,
title   = {Phosphorus implantation on near stoichiometric a-SIC:H films},
author = {Oliveira, A. R. and Paez Carreño, Marcelo Nelson},
year = {2002},
publisher = {The Electrochemical Society},
journal   = {Microelectronics Technology and Devices SBMICRO 2002}
}