@inbook{inbook45f1e4d3,
title   = {Diluted HNO3/HF as a final pre-oxidation cleaning step for MOS devices},
author = {Nogueira, Willian Aurélio and Toquetti, Leandro Zeidan and Santos Filho, Sebastião Gomes dos},
year = {2002},
publisher = {The Electrochemical Society},
journal   = {Microelectronics Technology and Devices SBMICRO 2002}
}