@inbook{inbookbcad19e6, title = {Fabrication of PMMA microlenses using a micromachined silicon moud}, author = {Cirino, Giuseppe Antonio and Arruda, Antonio C. and Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Gonçalves Neto, Luiz}, year = {2002}, publisher = {The Electrochemical Society}, journal = {Microelectronics Technology and Devices SBMICRO 2002} }