@inbook{inbookbad09622,
title   = {Porous silicon sacrifical layers applied on micromechanical structures fabrication},
author = {Dantas, Michel Oliveira da Silva and Galeazzo, Elisabete and Peres, Henrique Estanislau Maldonado and Ramírez Fernandez, Francisco Javier},
year = {2002},
publisher = {The Electrochemical Society},
journal   = {Microelectronics Technology and Devices SBMICRO 2002}
}