@inbook{inbook882ad018,
title   = {Mechanical properties of silicon oxide films deposited by PECVD-TEOS for application in MEMS structures and sensors},
author = {Gonçalves, Lucas Gonçalves Dias and Silva, Antônio Nélson Rodrigues da and Alfano, C.F. and Santos, J. C. and Morimoto, Nilton Itiro},
year = {2002},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO 2002, Porto Alegre, 2002}
}