@inbook{inbookfa4e4cb2,
title   = {Formation and characterization of the Ni(Pt)Si and NiSi for MOS devices applications},
author = {Santos, R.E. and Doi, Ioshiaki and Diniz, J. A. and Swart, Jacobus Willibrordus and Santos Filho, Sebastião Gomes dos},
year = {2002},
publisher = {The Electrochemical Society},
journal   = {Microelectronics Technology and Devices SBMICRO 2002}
}