@inbook{inbookac8f9b70,
title   = {Formation of nickel monosilicide onto (100) silicon wafer surfaces},
author = {Reis, Ronaldo Willian and Santos Filho, Sebastião Gomes dos and Laganá, Armando Antonio Maria and Doi, Ioshiaki and Swart, Jacobus Willibrordus},
year = {2002},
publisher = {The Electrochemical Society},
journal   = {Microelectronics Technology and Devices SBMICRO 2002}
}