@article{article46c32e36,
title   = {Local structure and bonds of amorphous silicon oxynitride thin films},
author = {Scopel, Wanderla Luis and Fantini, Márcia Carvalho de Abreu and Alayo Chávez, Marco Isaías and Pereyra, Inés},
year = {2002},
doi = {10.1016/s0040-6090(02)00346-2},
journal   = {Thin Solid Films}
}