@article{articleef1c23bb,
title   = {Effects of plasma etching on DLC films},
author = {Massi, Marcos and Mansano, Ronaldo Domingues and Maciel, Homero Santiago and Otani, C. and Verdonck, Patrick Bernard and Nishioka, L. N. B. M.},
year = {1999},
doi = {10.1016/s0040-6090(98)01691-5},
journal   = {Thin Solid Films}
}