@inproceedings{inproceedings98b2da14,
title   = {Study of CF4+H2 plasma surface modification of PMMA for plastic waveguides processing},
author = {Bartoli, Julio Roberto and Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Paez Carreño, Marcelo Nelson and Costa, Ricardo Aurélio da and Castro, Sandra C de and Martins, Oswaldo L. B. and Leone Filho, Raul},
year = {1998},
publisher = {Novodisc},
booktitle   = {International Conference on Microelectronics and Packaging}
}