@inproceedings{inproceedings6c2ff9f5,
title   = {The effect of electrode materials on etching mechanisms},
author = {Ruas, Ronaldo and Verdonck, Patrick Bernard and Mansano, Ronaldo Domingues and Braithwaite, Nicholas},
year = {2001},
publisher = {ISPC},
booktitle   = {International Symposium on Plasma Chemistry}
}