@inproceedings{inproceedings00d60111,
title   = {The applicability of Langmuir probes for end point detection of polymer etching},
author = {Mansano, Ronaldo Domingues and Nogueira, Paula Maria and Zambom, Luís da Silva and Verdonck, Patrick Bernard and Massi, Marcos and Maciel, Homero Santiago},
year = {1999},
publisher = {SBMicro/IMAPS},
booktitle   = {International Conference on Microelectronics and Packaging}
}