@inproceedings{inproceedings372a8485,
title   = {Influence of methane addition on the characteristics of magnetron sputtered hydrogenated carbon films},
author = {Mansano, Ronaldo Domingues and Nogueira, Paula Maria and Zambom, Luís da Silva and Verdonck, Patrick Bernard and Massi, Marcos and Maciel, Homero Santiago},
year = {1999},
publisher = {SBMicro/IMAPS},
booktitle   = {International Conference on Microelectronics and Packaging}
}