@article{article8fe2c83b,
title   = {Silicon surface roughness induced by SF6-based reactive ion etching processes for micromachining applications},
author = {Verdonck, Patrick Bernard and Mansano, Ronaldo Domingues and Maciel, Homero Santiago and Salvadori, Maria Cecília Barbosa da Silveira},
year = {1998},
journal   = {Journal of Solid-State Devices and Circuits}
}