@inproceedings{inproceedings6e1bdbda, title = {Optical characterization of an amorphous-hydrogenated carbon film and its application in phase modulated diffractive optical elements}, author = {Cirino, Giuseppe Antonio and Verdonck, Patrick Bernard and Mansano, Ronaldo Domingues and Gonçalves Neto, Luiz}, year = {2001}, publisher = {SBMicro}, booktitle = {International Conference on Microelectronics and Packaging} }