@inproceedings{inproceedings78bad395, title = {Analysis of porous silicon devices for gas sensors}, author = {Galeazzo, Elisabete and Peres, Henrique Estanislau Maldonado and Ramírez Fernandez, Francisco Javier}, year = {2001}, publisher = {SBMicro}, booktitle = {International Conference on Microelectronics and Packaging} }