@inproceedings{inproceedings226e425d,
title   = {Analysis of process parameters in "Smart cut" SOI structure fabrication},
author = {Escobar Forhan, Neisy Amparo and Braga, Nelson Liebentritt de Almeida and Gonçalves, José Lino},
year = {2001},
publisher = {SBMicro},
booktitle   = {International Conference on Microelectronics and Packaging}
}