@inproceedings{inproceedings92750f80,
title   = {Porous silicon masking by silicon oxide and hydrogen ion implantation},
author = {Peres, Henrique Estanislau Maldonado and Galeazzo, Elisabete and Dantas, Michel Oliveira da Silva and Ramírez Fernandez, Francisco Javier},
year = {2001},
publisher = {SBMicro},
booktitle   = {International Conference on Microelectronics and Packaging}
}