@inproceedings{inproceedings14b56ea7,
title   = {Development of a low temperature N and P type fabrication process by LPCVD and SPC techniques},
author = {Gautier, Gael and Crand, Samuel and Bonnaud, Olivier and Viana, Carlos Eduardo and Morimoto, Nilton Itiro},
year = {2001},
publisher = {SBMicro},
booktitle   = {International Conference on Microelectronics and Packaging}
}