@inproceedings{inproceedingsc6d22694,
title   = {The influence of process parameters on the electrical bahavior of silicon oxide thin films deposited by PECVD-TEOS},
author = {Silva, Ana Neilde Rodrigues da and Morimoto, Nilton Itiro and Bonnaud, Olivier},
year = {2001},
publisher = {SBMicro},
booktitle   = {International Conference on Microelectronics and Packaging}
}