@inproceedings{inproceedings1db3fba7,
title   = {Surface quality evaluation of diamond turned semiconductor crystal by means of atomic force microscopy},
author = {Jasinevicius, Renato Goulart and Silva, H. A. T. da and Montanari, Luciana and Tsukamoto, R. and Duduch, Jaime Gilberto},
year = {2001},
publisher = {ABCM},
booktitle   = {Congresso Brasileiro de Engenharia de Fabricação}
}