@article{article570190dd, title = {Electrical and structural characterisation of DLC films deposited by magnetron sputtering}, author = {Massi, Marcos and Maciel, Homero Santiago and Otani, C. and Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard}, year = {2001}, doi = {10.1023/A:1011252629646}, booktitle = {International Conference on Materials for Microelectronics} }