@article{articlefc49923c,
title   = {Performance characterization of an RIE reactor with built-in RF excitation antenna},
author = {Massi, Marcos and Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Maciel, Homero Santiago and Cirino, Giuseppe Antonio and Castro, Raul Murete de and Pisani, Marcelo B.},
year = {2000},
journal   = {Solid-State Devices and Circuits}
}