@article{articlefca0dd58, title = {Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering}, author = {Mansano, Ronaldo Domingues and Massi, Marcos and Zambom, Luís da Silva and Verdonck, Patrick Bernard and Nogueira, P. M. and Maciel, H. S. and Otani, Choyu}, year = {2000}, doi = {10.1016/s0040-6090(00)01088-9}, journal = {Thin Solid Films} }