@article{articlef5958fb9,
title   = {Tetraethylorthosilicate SiO2 films deposited at a low temperature},
author = {Silva, Ana Neilde Rodrigues da and Morimoto, Nilton Itiro and Bonnaud, Olivier},
year = {2000},
doi = {10.1016/s0026-2714(99)00296-6},
journal   = {Microelectronics and Realiability}
}