@article{article088365aa,
title   = {Application of fluorine based plasma etching processes in microfluidic device fabrication},
author = {Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Simões, Eliphas Wagner and Furlan, Rogério},
year = {2000},
journal   = {Journal of Solid-State Devices and Circuits}
}